University of Graz researches environmentally friendly semiconductor production

09.12.2024

University of Graz researches environmentally friendly semiconductor production

The EU research project “HaloFreeEtch” focuses on the development of new, environmentally friendly production methods for semiconductors using halogen-free etching processes.

How can technological innovations be combined with the circular economy and sustainability? This is a challenge that researchers at the Institute of Environmental Systems Science at the University of Graz are tackling. As a partner in a new EU project, Rupert Baumgartner’s team is contributing its expertise in sustainability assessment for industrial production processes. The “HaloFreeEtch” research project focuses on the development of new, environmentally friendly production methods for semiconductors using halogen-free etching processes.

Semiconductors are materials whose electrical conductivity is controlled by applying a voltage. This makes them essential components in all electronic devices. Plasma etching is used in their industrial production, primarily from silicon. In this process, material is removed through a chemical reaction with halogens such as sulphur hexfluoride (SF6), tetrafluoromethane (CF4), trifluoromethane (CHF3) or octafluorocyclobutane (C4F8). The process poses considerable environmental and health risks. The aim of the “HaloFreeEtch” research project is to replace halogens in etching processes for silicon and silicon oxide with more sustainable alternatives.

Decisions in terms of ecological and social sustainability

“At the Institute of Environmental Systems Science at the University of Graz, we are developing tools that support decisions in terms of ecological and social sustainability in the early stages of process and product design,” says Rupert Baumgartner, Head of the Christian Doppler Laboratory for Sustainable Product Management in a Circular Economy. For environmentally friendly semiconductor production, such decisions include the selection of suitable chemicals and the development of effective etching methods. “These are evaluated and identified using comprehensive life cycle data and the environmental impact assessment based on it. We are adapting established assessment methods for this purpose,” reports Saumya Sadhu, who is conducting research for her doctoral thesis in the project.

Industrial etching processes are planned and continuously improved with the help of simulations. However, environmental aspects have not yet been taken into account. This is set to change. “We will develop proposals in this regard that our project partners can then integrate into their simulations,” explains Baumgartner. His research group is thus further expanding its profile in the field of sustainability assessment and sustainability-oriented support for technical innovation projects. “HaloFreeEtch” complements ongoing projects on high-tech applications such as batteries for electric vehicles, including new recycling technologies and electrochemical production processes.

“HaloFreeEtch” is a four-year project involving renowned European research and industry partners. It is coordinated by Jörg Schuster from Chemnitz University of Technology. Rupert Baumgartner heads the sub-project at the University of Graz. “HaloFreeEtch” is being funded with 3.9 million euros as part of the Horizon Europe research program. The University of Graz’s share amounts to 476,750 euros.

https://halofreeetch.eu

Contact:

Prof. Dr. Rupert Baumgartner Institute of Environmental Systems Science at the University of Graz Tel.: +43 316 380 3237 E-Mail: rupert.baumgartner@uni-graz.at

[Source: APA Science, 9.12.2024]

Contact

Veronika Pranger

Green Tech Valley / Communications